BS ISO 13095:2014

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Procedure for probe characterization
6 Reporting of probe characteristics
Annex A (informative) - Dependence of AFM images on
        measurement mode and settings
Annex B (normative) - Reference sample preparation
Annex C (informative) - Example of a reference structure
Annex D (informative) - Results of EPSC measurement
        repeatability test
Annex E (informative) - Plane correction for probe shank
        profile analysis
Annex F (informative) - Example of a report
Bibliography

Defines two methods for characterizing the shape of an AFM probe tip, specifically the shank and approximate tip profiles.

This International Standard specifies two methods for characterizing the shape of an AFM probe tip, specifically the shank and approximate tip profiles. These methods project the profile of an AFM probe tip onto a given plane, and the characteristics of the probe shank are also projected onto that plane under defined operating conditions. The latter indicates the usefulness of a given probe for depth measurements in narrow trenches and similar profiles. This International Standard is applicable to the probes with radii greater than 5u₀, where u₀ is the uncertainty of the width of the ridge structure in the reference sample used to characterize the probe.