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BS ISO 16700:2016

Current

Current

The latest, up-to-date edition.

Microbeam analysis. Scanning electron microscopy. Guidelines for calibrating image magnification

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

31-07-2016

€243.07
Excluding VAT

DocumentType
Standard
Pages
30
PublisherName
British Standards Institution
Status
Current
Supersedes

This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.

Standards Relationship
ISO 16700:2016 Identical

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