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  • ISO 16700:2016

    Current The latest, up-to-date edition.

    Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

    Available format(s):  Hardcopy, PDF, PDF 3 Users, PDF 5 Users, PDF 9 Users

    Language(s):  English

    Published date:  18-07-2016

    Publisher:  International Organization for Standardization

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    Abstract - (Show below) - (Hide below)

    ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

    General Product Information - (Show below) - (Hide below)

    Committee ISO/TC 202/SC 4
    Development Note Supersedes ISO/DIS 16700. (07/2016)
    Document Type Standard
    Publisher International Organization for Standardization
    Status Current
    Supersedes

    Standards Referenced By This Book - (Show below) - (Hide below)

    DD ISO/TS 12805:2011 Nanotechnologies. Materials specifications. Guidance on specifying nano-objects
    DIN ISO 22309:2015-11 MICROBEAM ANALYSIS - QUANTITATIVE ANALYSIS USING ENERGY-DISPERSIVE SPECTROMETRY (EDS) FOR ELEMENTS WITH AN ATOMIC NUMBER OF 11 (NA) OR ABOVE (ISO 22309:2011)
    PD IEC/TS 62622:2012 Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings
    EN 1071-10:2009 Advanced technical ceramics - Methods of test for ceramic coatings - Part 10: Determination of coating thickness by cross sectioning
    BS ISO 22309:2011 Microbeam analysis. Quantitative analysis using energy-dispersive spectrometry (EDS) for elements with an atomic number of 11 (Na) or above
    08/30185924 DC : 0 BS EN 1071-10 - ADVANCED TECHNICAL CERAMICS - METHODS OF TEST FOR CERAMIC COATINGS - PART 10: DETERMINATION OF COATING THICKNESS BY CROSS SECTIONING
    PD ISO/TR 18196:2016 Nanotechnologies. Measurement technique matrix for the characterization of nano-objects
    DIN ISO 13067 E : 2015 MICROBEAM ANALYSIS - ELECTRON BACKSCATTER DIFFRACTION - MEASUREMENT OF AVERAGE GRAIN SIZE (ISO 13067:2011)
    NF ISO 22309 : 2012 MICROBEAM ANALYSIS - QUANTITATIVE ANALYSIS USING ENERGY-DISPERSIVE SPECTROMETRY (EDS) FOR ELEMENTS WITH AN ATOMIC NUMBER OF 11 (NA) OR ABOVE
    S.R. CWA 17253-1:2018 JOINT IMPLANTS - PART 1: NOVEL METHODS FOR ISOLATING WEAR PARTICLES FROM JOINT REPLACEMENTS AND RELATED DEVICES
    DIN ISO 22309 E : 2015 MICROBEAM ANALYSIS - QUANTITATIVE ANALYSIS USING ENERGY-DISPERSIVE SPECTROMETRY (EDS) FOR ELEMENTS WITH AN ATOMIC NUMBER OF 11 (NA) OR ABOVE (ISO 22309:2011)
    NF ISO 13067 : 2012 MICROBEAM ANALYSIS - ELECTRON BACKSCATTER DIFFRACTION - MEASUREMENT OF AVERAGE GRAIN SIZE
    ISO/TS 10798:2011 Nanotechnologies — Charaterization of single-wall carbon nanotubes using scanning electron microscopy and energy dispersive X-ray spectrometry analysis
    ASTM D 8128 : 2017 Standard Guide for Monitoring Failure Mode Progression in Industrial Applications with Rolling Element Ball Type Bearings
    ISO 22309:2011 Microbeam analysis — Quantitative analysis using energy-dispersive spectrometry (EDS) for elements with an atomic number of 11 (Na) or above
    BS ISO 13067:2011 Microbeam analysis. Electron backscatter diffraction. Measurement of average grain size
    ISO/TS 24597:2011 Microbeam analysis — Scanning electron microscopy — Methods of evaluating image sharpness
    UNI EN 1071-10 : 2009 ADVANCED TECHNICAL CERAMICS - METHODS OF TEST FOR CERAMIC COATINGS - PART 10: DETERMINATION OF COATING THICKNESS BY CROSS SECTIONING
    ISO/TS 12805:2011 Nanotechnologies Materials specifications Guidance on specifying nano-objects
    I.S. EN 1071-10:2009 ADVANCED TECHNICAL CERAMICS - METHODS OF TEST FOR CERAMIC COATINGS - PART 10: DETERMINATION OF COATING THICKNESS BY CROSS SECTIONING
    IEC TS 62622:2012 Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings
    DD ISO/TS 10798 : DRAFT JULY 2011 NANOTECHNOLOGIES - CHARACTERIZATION OF SINGLEWALL CARBON NANOTUBES USING SCANNING ELECTRON MICROSCOPY AND ENERGY DISPERSIVE X-RAY SPECTROMETRY ANALYSIS
    BS EN 1071-10:2009 Advanced technical ceramics. Methods of test for ceramic coatings Determination of coating thickness by cross sectioning
    DIN ISO 13067:2015-12 Microbeam analysis - Electron backscatter diffraction - Measurement of average grain size (ISO 13067:2011)
    ISO/TR 10993-22:2017 Biological evaluation of medical devices — Part 22: Guidance on nanomaterials
    ISO 29301:2017 Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures
    ISO 13067:2011 Microbeam analysis Electron backscatter diffraction Measurement of average grain size
    ISO/TR 18196:2016 Nanotechnologies — Measurement technique matrix for the characterization of nano-objects
    08/30138435 DC : DRAFT SEP 2008 BS ISO 24597 - MICROBEAM ANALYSIS - SCANNING ELECTRON MICROSCOPY - METHODS FOR THE EVALUATION OF IMAGE SHARPNESS
    PD ISO/TR 10993-22:2017 Biological evaluation of medical devices Guidance on nanomaterials
    BS ISO 29301:2017 Microbeam analysis. Analytical electron microscopy. Methods for calibrating image magnification by using reference materials with periodic structures
    DIN EN 1071-10:2009-10 Advanced technical ceramics - Methods of test for ceramic coatings - Part 10: Determination of coating thickness by cross sectioning
    XP ISO/TS 24597 : 2011 XP MICROBEAM ANALYSIS - SCANNING ELECTRON MICROSCOPY - METHODS OF EVALUATING IMAGE SHARPNESS

    Standards Referencing This Book - (Show below) - (Hide below)

    ISO/IEC 17025:2005 General requirements for the competence of testing and calibration laboratories
    ISO 5725-1:1994 Accuracy (trueness and precision) of measurement methods and results — Part 1: General principles and definitions
    ISO Guide 35:2017 Reference materials Guidance for characterization and assessment of homogeneity and stability
    ISO Guide 30:2015 Reference materials Selected terms and definitions
    ISO Guide 34:2009 General requirements for the competence of reference material producers
    ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)
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