BS ISO 18516:2006
Current
The latest, up-to-date edition.
Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution
Hardcopy , PDF
English
30-11-2006
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms, definitions, symbols and abbreviated terms
3.1 Terms and definitions
3.2 Symbols and abbreviated terms
4 General information
4.1 Background information
4.2 Measurement of lateral resolution in AES and XPS
4.3 Dependence of lateral resolution on scan direction
4.4 Methods for the measurement of lateral resolution
in AES and XPS
5 Measurement of lateral resolution with the straight-edge
method
5.1 Introduction
5.2 Variants of the straight-edge method
5.3 Selection of the straight-edge specimen
5.4 Mounting the straight-edge specimen
5.5 Cleaning the straight-edge specimen
5.6 Operating the instrument
5.7 Data collection
5.8 Data analysis
6 Measurement of lateral resolution with the grid method
6.1 Introduction
6.2 Selection of the grid specimen
6.3 Mounting the grid specimen
6.4 Cleaning the grid specimen
6.5 Operating the instrument
6.6 Data collection
6.7 Data analysis
7 Measurement of lateral resolution with the gold-island
method
7.1 Introduction
7.2 Selection of the gold-island specimen
7.3 Mounting the gold-island specimen
7.4 Cleaning the gold-island specimen
7.5 Operating the instrument
7.6 Data collection
7.7 Data analysis
Annex A (informative) Determination of lateral resolution
of an XPS instrument with a focused X-ray spot
Annex B (informative) Determination of lateral resolution
from a secondary-electron line scan
Annex C (informative) Determination of lateral resolution
from Auger-electron line scans
Bibliography
Specifies three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings.
| Committee |
CII/60
|
| DevelopmentNote |
Reviewed and confirmed by BSI, June 2010. (05/2010)
|
| DocumentType |
Standard
|
| Pages |
34
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
This International Standard describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1µm. The grid method is suitable if the lateral resolution is expected to be less than 1µm but more than 20nm. The gold-island method is suitable for instruments where the lateral resolution is expected to be smaller than 50nm.
AnnexesA, B and C provide illustrative examples of the measurement of lateral resolution.
| Standards | Relationship |
| ISO 18516:2006 | Identical |
| ISO 21270:2004 | Surface chemical analysis X-ray photoelectron and Auger electron spectrometers Linearity of intensity scale |
| ISO 15470:2017 | Surface chemical analysis — X-ray photoelectron spectroscopy — Description of selected instrumental performance parameters |
| ISO 18115:2001 | Surface chemical analysis Vocabulary |
| ISO/TR 19319:2013 | Surface chemical analysis Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods |
| ISO 15471:2016 | Surface chemical analysis Auger electron spectroscopy Description of selected instrumental performance parameters |
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