CEI EN 61094-6 : 2005

1 scope
2 Normative references
3 Terms and definitions
4 Reference environmental conditions
5 Principle of electrostatic actuator
  operation
6 Actuator design
7 Validation
8 Measurement of electrostatic actuator
  response
9 Applications of an electrostatic actuator
Annex A (informative) - Examples of
        electrostatic actuator designs
Annex B (informative) - Set-up for measuring
        electrostatic actuator response
Annex C (informative) - Typical uncertainty
        analysis
Annex D (informative) - Difference between
        free-field-, pressure- and actuator
        responses for typical - models of
        measurement microphones
Annex ZA (normative) - Normative references
         to international publications with
         their corresponding European
         publications

Provides guidelines for the design of Express actuators for microphones equipped with electrically conductive diaphragms; - gives methods for the validation of electrostatic actuators; - gives a method for determining the electrostatic actuator response of a microphone.