CGA G-13 : 2016
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
STORAGE AND HANDLING OF SILANE AND SILANE MIXTURES
Hardcopy
06-04-2023
English
01-08-2016
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1 Introduction
2 Scope and purpose
3 Definitions
4 Physical and chemical properties
5 Packaging information
6 Outdoor storage and use
7 Indoor storage and use
8 System configuration - cylinder sources
9 System configuration - bulk sources
10 Piping and components
11 Gas and flame detection
12 Fire protection system
13 Ventilation systems
14 Venting and treatment
15 Purge gas system
16 Electrical requirements
17 Fundamental supervisory control requirements
18 Container filling
19 References
20 Additional references
Appendices
Appendix A - Personnel protection (Informative)
Appendix B - Explanatory material (Informative)
Appendix C - Thermal radiation (Normative)
Appendix D - Guidance on overpressure based separation
distances for bulk silane storage or use (Normative)
Describes the installation of systems and sources that are used to store, transfer, or contain silane or silane mixtures.
| DevelopmentNote |
Supersedes CGA P 32 (03/2006)
|
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Compressed Gas Association
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| NFPA 318 : 2018 | PROTECTION OF SEMICONDUCTOR FABRICATION FACILITIES |
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