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  • NFPA 318 : 2018

    View superseded by
    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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    PROTECTION OF SEMICONDUCTOR FABRICATION FACILITIES

    Available format(s):  Hardcopy

    Superseded date:  15-10-2021

    Language(s):  English

    Published date:  01-01-2018

    Publisher:  National Fire Protection Association

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    Table of Contents - (Show below) - (Hide below)

    Chapter 1 - Administration
    Chapter 2 - Referenced Publications
    Chapter 3 - Definitions
    Chapter 4 - Building Construction and Related Services
    Chapter 5 - Hazardous Materials - General Provisions
    Chapter 6 - Liquid Chemical Storage and Handling
    Chapter 7 - Gas Storage and Handling
    Chapter 8 - Production and Support Equipment
    Chapter 9 - Exhaust Systems
    Chapter 10 - Waste Treatment
    Chapter 11 - Fire Protection
    Chapter 12 - General Safety Precautions
    Annex A - Explanatory Material
    Annex B - Seismic Protection
    Annex C - Production and Support Equipment
    Annex D - Informational References
    Index

    Abstract - (Show below) - (Hide below)

    Pertains to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled - containing a cleanroom or clean zone or both.

    General Product Information - (Show below) - (Hide below)

    Document Type Standard
    Publisher National Fire Protection Association
    Status Superseded
    Superseded By
    Supersedes

    Standards Referenced By This Book - (Show below) - (Hide below)

    NFPA 556 : 2016 GUIDE ON METHODS FOR EVALUATING FIRE HAZARD TO OCCUPANTS OF PASSENGER ROAD VEHICLES
    NFPA 204 : 2018 SMOKE AND HEAT VENTING
    NFPA 5000 : 2018 BUILDING CONSTRUCTION AND SAFETY CODE
    NFPA 556 : 2020 GUIDE ON METHODS FOR EVALUATING FIRE HAZARD TO OCCUPANTS OF PASSENGER ROAD VEHICLES
    NFPA 400 : 2016 HAZARDOUS MATERIALS CODE
    NFPA 1404 : 2018 FIRE SERVICE RESPIRATORY PROTECTION TRAINING
    NFPA 2 : 2016 HYDROGEN TECHNOLOGIES CODE
    NFPA 91 : 2015 EXHAUST SYSTEMS FOR AIR CONVEYING OF VAPORS, GASES, MISTS, AND PARTICULATE SOLIDS
    NFPA 92B : 2009 SMOKE MANAGEMENT SYSTEMS IN MALLS, ATRIA, AND LARGE SPACES
    NFPA 92A : 2009 SMOKE-CONTROL SYSTEMS UTILIZING BARRIERS AND PRESSURE DIFFERENCES
    NFPA 1 : 2021 FIRE CODE
    NFPA 921 : 2017 GUIDE FOR FIRE AND EXPLOSION INVESTIGATIONS
    NFPA 55 : 2016 COMPRESSED GASES AND CRYOGENIC FLUIDS CODE
    ICC 2012 INTERNATIONAL FIRE CODE : 2012 INTERNATIONAL FIRE CODE
    ICC IFC CODE & COMMENTARY VOLUME 1 & 2 : 2015 IFC® Code and Commentary
    NFPA 287 : 2017 STANDARD TEST METHODS FOR MEASUREMENT OF FLAMMABILITY OF MATERIALS IN CLEANROOMS USING A FIRE PROPAGATION APPARATUS (FPA)
    NFPA 1 : 2018 FIRE CODE

    Standards Referencing This Book - (Show below) - (Hide below)

    NFPA 2001 : 2015 CLEAN AGENT FIRE EXTINGUISHING SYSTEMS
    NFPA 750 : 2015 WATER MIST FIRE PROTECTION SYSTEMS
    UL 2360:1ED 2000-05 Test Methods for Determining the Combustibility Characteristics of Plastics Used in Semi-Conductor Tool Construction
    FM 4910 : 2013 CLEANROOM MATERIALS FLAMMABILITY TEST PROTOCOL
    NFPA 25 : 2017 INSPECTION, TESTING, AND MAINTENANCE OF WATER-BASED FIRE PROTECTION SYSTEMS
    CGA G-13 : 2016 STORAGE AND HANDLING OF SILANE AND SILANE MIXTURES
    NFPA 287 : 2017 STANDARD TEST METHODS FOR MEASUREMENT OF FLAMMABILITY OF MATERIALS IN CLEANROOMS USING A FIRE PROPAGATION APPARATUS (FPA)
    NFPA 329 : 2015 HANDLING RELEASES OF FLAMMABLE AND COMBUSTIBLE LIQUIDS AND GASES
    SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    NFPA 101 : 2018 LIFE SAFETY CODE
    NFPA 79 : 2015 ELECTRICAL STANDARD FOR INDUSTRIAL MACHINERY
    UL 900:8ED 2015-04 Air Filter Units
    NFPA 400 : 2016 HAZARDOUS MATERIALS CODE
    NFPA 90A : 2018 INSTALLATION OF AIR-CONDITIONING AND VENTILATING SYSTEMS
    ISA 84.01 : 1996 APPLICATION OF SAFETY INSTRUMENTED SYSTEMS FOR THE PROCESS INDUSTRIES
    ASME B31.3:2016 PROCESS PIPING
    NFPA 5000 : 2018 BUILDING CONSTRUCTION AND SAFETY CODE
    FM 4922 : 1994 FUME EXHAUST DUCTS OR FUME AND SMOKE EXHAUST DUCTS
    ASME A13.1 : 2015 SCHEME FOR THE IDENTIFICATION OF PIPING SYSTEMS
    NFPA 69 : 2014 EXPLOSION PREVENTION SYSTEMS
    NFPA 704 : 2017 STANDARD SYSTEM FOR THE IDENTIFICATION OF THE HAZARDS OF MATERIALS FOR EMERGENCY RESPONSE
    CFR 49(PTS100-177) : OCT 2017 TRANSPORTATION
    IEEE/ASTM SI_10-2010 American National Standard for Metric Practice
    SEMI F1 : 2012 SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS
    NFPA 385 : 2017 TANK VEHICLES FOR FLAMMABLE AND COMBUSTIBLE LIQUIDS
    NFPA 68 : 2013 EXPLOSION PROTECTION BY DEFLAGRATION VENTING
    NFPA 55 : 2016 COMPRESSED GASES AND CRYOGENIC FLUIDS CODE
    NFPA 51B : 2014 FIRE PREVENTION DURING WELDING, CUTTING, AND OTHER HOT WORK
    NFPA 70 : 2017 NATIONAL ELECTRICAL CODE
    CFR 29(PT1910.1000 TO END) : 0 LABOR - OCCUPATIONAL SAFETY AND HEALTH ADMINISTRATION, DEPARTMENT OF LABOR
    NFPA 12 : 2015 CARBON DIOXIDE EXTINGUISHING SYSTEMS
    NFPA 1 : 2018 FIRE CODE
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    NFPA 72 : 2016 NATIONAL FIRE ALARM AND SIGNALING CODE
    NFPA 13 : 2016 INSTALLATION OF SPRINKLER SYSTEMS
    NFPA 30 : 2018 FLAMMABLE AND COMBUSTIBLE LIQUIDS CODE
    NFPA 1670 : 2017 OPERATIONS AND TRAINING FOR TECHNICAL SEARCH AND RESCUE INCIDENTS
    NFPA 37 : 2018 INSTALLATION AND USE OF STATIONARY COMBUSTION ENGINES AND GAS TURBINES
    UL 263:14ED 2011-06 Fire Tests of Building Construction and Materials
    ASME PV CODE SET : 2017 BOILER AND PRESSURE VESSEL CODE - COMPLETE SET
    SEMI S14 : 2016 SAFETY GUIDELINES FOR FIRE RISK ASSESSMENT AND MITIGATION FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    ASTM E 1354 : 2017 : REDLINE Standard Test Method for Heat and Visible Smoke Release Rates for Materials and Products Using an Oxygen Consumption Calorimeter
    SEMI S3 : 2011(R2017)E SAFETY GUIDELINE FOR PROCESS LIQUID HEATING SYSTEMS
    NFPA 497 : 2017 CLASSIFICATION OF FLAMMABLE LIQUIDS, GASES, OR VAPORS AND OF HAZARDOUS (CLASSIFIED) LOCATIONS FOR ELECTRICAL INSTALLATIONS IN CHEMICAL PROCESS AREAS
    NFPA 92 : 2015 SMOKE CONTROL SYSTEMS
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