DIN 28400-4:1976-03
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
VACUUM TECHNOLOGY - TERMS AND DEFINITIONS, VACUUM COATING
01-08-2002
12-01-2013
1 Allgemeine Begriffe
1.1 Vakuumbeschichten
1.2 Substrat/Beschichtungsgut
1.3 Beschichtungsmaterialien/Beschichtungssubstanzen
1.4 Schichtmaterial (Schichtsubstanz)
1.5 Beschichtungsrate (flächenbezogen)
1.6 Bedampfungswinkel
2 Verfahren
2.1 Verfahren zum Vakuumbedampfen und
Vakuumverdampfen
2.2 Verfahren zum Vakuumbestäuben und Vakuumzerstäuben
2.3 Hilfsverfahren
3 Spezifische Bauteile
3.1 Beschichtungskammer
3.2 Verdampfereinrichtung
3.3 Zerstäubungseinrichtung
3.4 Abdeckvorrichtungen
3.5 Haltevorrichtungen, Aufnahmevorrichtungen,
Wechselvorrichtungen
3.6 Substratheizung
3.7 Substratkühlung
3.8 Glimmeinrichtung
4 Vakuumbeschichtungsanlagen
4.1 Art des Beschichtungsverfahrens
4.2 Bewegungszustand des Substrats
4.3 Durchlaufbeschichtungsanlage
4.4 Schleusenbeschichtungsanlage
4.5 Einzel- und Massengutbeschichtungsanlagen
| DocumentType |
Standard
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
|
| Status |
Withdrawn
|
| DIN 28400-7:1978-07 | VACUUM TECHNOLOGY; TERMS AND DEFINITIONS, VACUUM METALLURGY |
| DIN 28402:1976-12 | Vacuum technology; quantities, symbols, units, summary |
| DIN 28418-1:1976-05 | VACUUM TECHNOLOGY; STANDARD METHOD FOR VACUUM GAUGE CALIBRATION BY DIRECT COMPARISON WITH A REFERENCE VACUUM GAUGE |
| DIN 65099-6:1989-11 | AEROSPACE; CLASSIFICATION OF SPECIAL WORKSHOP FACILITIES; PROCESS GROUP E; COATING |
| DIN 41848-1:1983-07 | INTEGRATED FILM CIRCUITS; TERMS AND DEFINITIONS |
| DIN 28428:1978-11 | Vacuum technology; acceptance specifications for turbomolecular pumps |
| DIN 28427:1983-02 | VACUUM TECHNOLOGY; ACCEPTANCE SPECIFICATIONS FOR DIFFUSIONS PUMPS AND VAPOUR JET VACUUM PUMPS FOR VAPOUR PRESSURES OF THE PUMP FLUID <1 MBAR |
| DIN 28403:1986-09 | VACUUM TECHNOLOGY - QUICK RELEASE COUPLINGS - CLAMPED TYPE COUPLINGS |
| DIN 28400-1:1990-05 | VACUUM TECHNOLOGY - TERMS AND DEFINITIONS - GENERAL TERMS |
| DIN 28402:1976-12 | Vacuum technology; quantities, symbols, units, summary |
| DIN 28400-5:1981-03 | VACUUM TECHNOLOGY; TERMS AND DEFINITIONS; VACUUM DRYING AND LYOPHILISATION |
| DIN 28400-3:2013-06 | VACUUM TECHNOLOGY - TERMS AND DEFINITIONS - PART 3: VACUUM GAUGES |
| DIN 28426-1:1983-08 | Vacuum technology; acceptance specifications for rotary plunger vacuum pumps, sliding vane rotary vacuum pumps and rotary piston vacuum pumps for the ranges of rough and medium vacuum |
| DIN 28401:2008-03 | Vacuum technology - Graphical symbols - Summary |
| DIN 28411:1976-03 | Vacuum technology; acceptance specifications for mass spectrometer-type leak-detector, terms |
| DIN 28426-2:1976-03 | Vacuum technology; acceptance specifications for roots vacuum pumps for the range of medium vacuum |
| DIN 28400-2:1980-10 | VACUUM TECHNOLOGY; TERMS AND DEFINITIONS, VACUUM PUMPS |
| DIN 28416:1976-03 | VACUUM TECHNOLOGY; CALIBRATION OF VACUUM GAUGES WITHIN THE RANGE OF 10-3 TO 10-7 MBAR, GENERAL METHOD: PRESSURE REDUCTION BY CONTINUOUS FLOW |
| DIN 28404:1986-10 | VACUUM TECHNOLOGY - FLANGES - DIMENSIONS |
| DIN 28418-1:1976-05 | VACUUM TECHNOLOGY; STANDARD METHOD FOR VACUUM GAUGE CALIBRATION BY DIRECT COMPARISON WITH A REFERENCE VACUUM GAUGE |
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