DIN EN 61094-6:2005-05

1 Scope
2 Normative references
3 Terms and definitions
4 Reference environmental conditions
5 Principle of electrostatic actuator operation
  5.1 General
  5.2 Electrostatic pressure
  5.3 Electrostatic actuator response
6 Actuator design
  6.1 General
  6.2 Design
7 Validation
  7.1 General
  7.2 Repeatability of measurements
  7.3 Uniformity of actuators of a given model
  7.4 Uniformity of the difference between actuator and
      pressure response levels
8 Measurement of electrostatic actuator response
  8.1 System for measurement of electrostatic actuator
      response
  8.2 Uncertainty components
9 Applications of an electrostatic actuator
  9.1 General
  9.2 Verification of the frequency response of a
      measurement system
  9.3 Determination of the environmental characteristics
      of microphone measurement systems
  9.4 Determination of free-field and pressure frequency
      responses
  9.5 Measurement of actuator response at very high
      frequencies
Annex A (informative) Examples of electrostatic actuator
                       designs
Annex B (informative) Set-up for measuring electrostatic
                       actuator response
Annex C (informative) Typical uncertainty analysis
Annex D (informative) Difference between free-field-,
                       pressure- and actuator responses
                       for typical models of measurement
                       microphones
Annex ZA (normative) Normative references to international
                       publications with their corresponding
                       European publications

Provides guidelines for the design of actuators for microphones equipped with electrically conductive diaphragms; gives methods for the validation of electrostatic actuators; gives a method for determining the electrostatic actuator response of a microphone.