Development Note
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Supersedes DIN EN 100015-1, DIN EN 100015-2, DIN EN 100015-3 and DIN EN 100015-4. (02/2002) Supersedes DIN IEC 61340-5-1. (07/2008) |
Document Type
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Standard |
ISBN
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Pages
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Published
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Publisher
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Verband Deutscher Elektrotechniker
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Status
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Current |
Supersedes
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VDI 2083 Blatt 17:2013-06
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Cleanroom technology - Compatibility of materials with the required cleanliness |
VDI 2083 Blatt 9.1:2006-12
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Clean room technology - Compatibility with required cleanliness and surface cleanliness |
VDI 2083 Blatt 4.1:2006-10
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Cleanroom technology - Planning, construction and start-up of cleanrooms |
VDI 2083 Blatt 5.1:2007-09
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Cleanroom technology - Cleanroom operation |
VDI 2119:2013-06
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Ambient air measurements - Sampling of atmospheric particles > 2,5 ?m on an acceptor surface using the Sigma-2 passive sampler - Characterisation by optical microscopy and calculation of number settling rate and mass concentration |
DIN EN ISO 14644-9:2012-12
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Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012) |
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