SEMICONDUCTOR DEVICES - TIME DEPENDENT DIELECTRIC BREAKDOWN (TDDB) TEST FOR GATE DIELECTRIC FILMS

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Hardcopy , PDF

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German

Published date

01-01-2008

Publisher

German Institute for Standardisation (Deutsches Institut für Normung)

Festgelegt sind in dieser Norm sowohl ein Prüf- und Messverfahren zum zeitabhängigen dielektrischen Durchbruch (TDDB; en: time dependent dielectric breakdown) bei dielektrischen Gate-Schichten von Halbleiterbauelementen als auch ein Verfahren zum Abschätzen der Bauelementelebensdauer bezogen auf TDDB-Ausfälle.

DevelopmentNote	Supersedes DIN IEC 62374. (02/2008)
DocumentType	Standard
Pages	24
PublisherName	German Institute for Standardisation (Deutsches Institut für Normung)
Status	Current
Supersedes	DIN IEC 62374:2004-09 (Draft)

Standards	Relationship
EN 62374:2007	Identical

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DIN EN 62374:2008-02

SEMICONDUCTOR DEVICES - TIME DEPENDENT DIELECTRIC BREAKDOWN (TDDB) TEST FOR GATE DIELECTRIC FILMS

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