EN 62374:2007
Current
The latest, up-to-date edition.
Semiconductor devices - Time Dependent Dielectric Breakdown (TDDB) test for gate dielectric films
19-10-2007
1 Scope
2 Terms and definitions
3 Test equipment
4 Test samples
4.1 General
4.2 Test structure: capacitor structure
4.3 Area
5 Procedures
5.1 General
5.2 Pre-test
5.3 Test conditions
5.4 Criteria
6 Lifetime estimation
6.1 General
6.2 Acceleration model
6.3 A procedure for a lifetime estimation
7 Lifetime dependence on gate oxide area
Annex A (informative) - Supplementary determining test
condition and data analysis
Bibliography
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