Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)

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German, English

Published date

01-10-2022

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€146.22

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DocumentType	Standard
Pages	0
PublisherName	German Institute for Standardisation (Deutsches Institut für Normung)
Status	Current
Supersedes	DIN EN ISO 14644-10:2013-06 DIN EN ISO 14644-10:2022-03 (Draft)

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DIN EN ISO 14644-10:2022-10