• EN 60204-33 : 2011

    Current The latest, up-to-date edition.

    SAFETY OF MACHINERY - ELECTRICAL EQUIPMENT OF MACHINES - PART 33: REQUIREMENTS FOR SEMICONDUCTOR FABRICATION EQUIPMENT

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    Language(s): 

    Published date:  04-03-2011

    Publisher:  European Committee for Standards - Electrical

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    Table of Contents - (Show below) - (Hide below)

    FOREWORD
    INTRODUCTION
    1 Scope
    2 Normative references
    3 Terms and definitions
    4 General requirements
    5 Incoming supply conductor terminations and
       devices for disconnecting and switching off
    6 Protection against electric shock
    7 Protection of equipment
    8 Equipotential bonding
    9 Control circuits, emergency off (EMO), and
       protective interlock circuits
    10 Operator interfaces
    11 Controlgear: location, mounting, and enclosures
    12 Conductors and cables
    13 Wiring practices
    14 Electric motors and associated equipment
    15 Accessories and lighting
    16 Marking, warning signs and reference designations
    17 Technical documentation
    18 Testing
    Annex A (normative) - Basic protection (protection
            against indirect contact) in TN-systems
    Annex B (normative) - Protection against indirect contact
            in TT-systems (Derived from IEC 60364-4-41:2005
            and IEC 60364-6:2006)
    Annex C (normative) - Conductor ampacity, and creepage
            and clearance distances
    Annex D (normative) - Standard test fingers
    Annex E (informative) - Types of system earthing (Derived
            from IEC 60364-1: 2005)
    Bibliography
    Annex ZA (normative) - Normative references to
             international publications with their
             corresponding European publications
    Annex ZZ (informative) - Coverage of Essential Requirements
             of EC Directives

    Abstract - (Show below) - (Hide below)

    IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

    General Product Information - (Show below) - (Hide below)

    Committee TC 44X
    Document Type Standard
    Publisher European Committee for Standards - Electrical
    Status Current

    Standards Referencing This Book - (Show below) - (Hide below)

    EN 60446:2007 BASIC AND SAFETY PRINCIPLES FOR MAN-MACHINE INTERFACE, MARKING AND IDENTIFICATION - IDENTIFICATION OF CONDUCTORS BY COLOURS OR ALPHANUMERICS
    IEC 60950-1:2005+AMD1:2009+AMD2:2013 CSV Information technology equipment - Safety - Part 1: General requirements
    IEC 61800-3:2017 Adjustable speed electrical power drive systems - Part 3: EMC requirements and specific test methods
    IEC 60364-5-54:2011 Low-voltage electrical installations - Part 5-54: Selection and erection of electrical equipment - Earthing arrangements and protective conductors
    IEC 60038:2009 IEC standard voltages
    IEC 61000-6-4:2006+AMD1:2010 CSV ELECTROMAGNETIC COMPATIBILITY (EMC) - PART 6-4: GENERIC STANDARDS - EMISSION STANDARD FOR INDUSTRIAL ENVIRONMENTS
    IEC 60364-4-43:2008 Low-voltage electrical installations - Part 4-43: Protection for safety - Protection against overcurrent
    IEC 61984:2008 Connectors - Safety requirements and tests
    HD 60364-4-43 : 2010 LOW-VOLTAGE ELECTRICAL INSTALLATIONS - PART 4-43: PROTECTION FOR SAFETY - PROTECTION AGAINST OVERCURRENT
    IEC 60050-195:1998 International Electrotechnical Vocabulary (IEV) - Part 195: Earthing and protection against electric shock
    IEC 60364-4-41:2005+AMD1:2017 CSV Low voltage electrical installations - Part 4-41: Protection for safety - Protection against electric shock
    IEC 60073:2002 Basic and safety principles for man-machine interface, marking and identification - Coding principles for indicators and actuators
    EN 60073:2002 Basic and safety principles for man-machine interface, marking and identification - Coding principles for indicators and actuators
    EN 61558-1:2005/A1:2009 SAFETY OF POWER TRANSFORMERS, POWER SUPPLIES, REACTORS AND SIMILAR PRODUCTS - PART 1: GENERAL REQUIREMENTS AND TESTS
    IEC TR 62513:2008 Safety of machinery - Guidelines for the use of communication systems in safety-related applications
    IEC 60050-441:1984 International Electrotechnical Vocabulary (IEV) - Part 441: Switchgear, controlgear and fuses
    IEC 60204-1:2016 Safety of machinery - Electrical equipment of machines - Part 1: General requirements
    IEC 60364-5-53:2001+AMD1:2002+AMD2:2015 CSV Electrical installations of buildings - Part 5-53: Selection and erection of electrical equipment - Isolation, switching and control
    HD 60364-4-41:2017/A11:2017 LOW-VOLTAGE ELECTRICAL INSTALLATIONS - PART 4-41: PROTECTION FOR SAFETY - PROTECTION AGAINST ELECTRIC SHOCK
    EN 60950-1:2006/A2:2013 INFORMATION TECHNOLOGY EQUIPMENT - SAFETY - PART 1: GENERAL REQUIREMENTS (IEC 60950-1:2005/A2:2013, MODIFIED)
    IEC 61558-2-16:2009+AMD1:2013 CSV Safety of transformers, reactors, power supply units and similar products for supply voltages up to 1 100 V - Part 2-16: Particularrequirements and tests for switch mode power supply units andtransformers for switch mode power supply units
    IEC 61000-6-1 : 3.0 ELECTROMAGNETIC COMPATIBILITY (EMC) - PART 6-1: GENERIC STANDARDS - IMMUNITY STANDARD FOR RESIDENTIAL, COMMERCIAL AND LIGHT-INDUSTRIAL ENVIRONMENTS
    IEC 61310-3:2007 Safety of machinery - Indication, marking and actuation - Part 3: Requirements for the location and operation of actuators
    IEC 60947-5-1 : 4.0 LOW-VOLTAGE SWITCHGEAR AND CONTROLGEAR - PART 5-1: CONTROL CIRCUIT DEVICES AND SWITCHING ELEMENTS - ELECTROMECHANICAL CONTROL CIRCUIT DEVICES
    ISO 13851:2002 Safety of machinery Two-hand control devices Functional aspects and design principles
    IEC 60204-32:2008 Safety of machinery - Electrical equipment of machines - Part 32: Requirements for hoisting machines
    IEC 61558-2-6:2009 Safety of transformers, reactors, power supply units and similar products for supply voltages up to 1 100 V - Part 2-6: Particular requirements and tests for safety isolating transformers and power supply units incorporating safety isolating transformers
    IEC TR 61000-5-2:1997 Electromagnetic compatibility (EMC) - Part 5: Installation and mitigation guidelines - Section 2: Earthing and cabling
    IEC 61082-1:2014 RLV Preparation of documents used in electrotechnology - Part 1: Rules
    IEC 60050-442:1998 International Electrotechnical Vocabulary (IEV) - Part 442: Electrical accessories
    2006/42/EC : 2006 AMD 4 2014 DIRECTIVE 2006/42/EC OF THE EUROPEAN PARLIAMENT AND OF THE COUNCIL OF 17 MAY 2006 ON MACHINERY, AND AMENDING DIRECTIVE 95/16/EC (RECAST) (TEXT WITH EEA RELEVANCE)
    EN 61557-3:2007 Electrical safety in low voltage distribution systems up to 1 000 V a.c. and 1 500 V d.c. - Equipment for testing, measuring or monitoring of protective measures - Part 3: Loop impedance
    IEC 61000-6-3:2006+AMD1:2010 CSV Electromagnetic compatibility (EMC) - Part 6-3: Generic standards - Emission standard for residential, commercial and light-industrial environments
    IEC 60364-6:2016 Low voltage electrical installations - Part 6: Verification
    EN 60447:2004 BASIC AND SAFETY PRINCIPLES FOR MAN-MACHINE INTERFACE, MARKING AND IDENTIFICATION - ACTUATING PRINCIPLES
    IEC 61558-1:2017 Safety of transformers, reactors, power supply units and combinations thereof - Part 1: General requirements and tests
    EN 61800-5-1:2007/A1:2017 ADJUSTABLE SPEED ELECTRICAL POWER DRIVE SYSTEMS - PART 5-1: SAFETY REQUIREMENTS - ELECTRICAL, THERMAL AND ENERGY (IEC 61800-5-1:2007/A1:2016)
    IEC 60447:2004 Basic and safety principles for man-machine interface, marking and identification - Actuating principles
    EN 60034-11 : 2004 ROTATING ELECTRICAL MACHINES - PART 11: THERMAL PROTECTION
    IEC 60529:1989+AMD1:1999+AMD2:2013 CSV Degrees of protection provided by enclosures (IP Code)
    IEC 60695-11-10:2013 Fire hazard testing - Part 11-10: Test flames - 50 W horizontal and vertical flame test methods
    EN 62061:2005/A2:2015 SAFETY OF MACHINERY - FUNCTIONAL SAFETY OF SAFETY-RELATED ELECTRICAL, ELECTRONIC AND PROGRAMMABLE ELECTRONIC CONTROL SYSTEMS (IEC 62061:2005/A2:2015)
    EN 61032 : 1998 PROTECTION OF PERSONS AND EQUIPMENT BY ENCLOSURES - PROBES FOR VERIFICATION (IEC 61032:1997)
    IEC 60439-1:1999+AMD1:2004 CSV Low-voltage switchgear and controlgear assemblies - Part 1: Type-tested and partially type-tested assemblies
    ISO 12100-2:2003 Safety of machinery Basic concepts, general principles for design Part 2: Technical principles
    IEC 60034-1:2017 Rotating electrical machines - Part 1: Rating and performance
    EN ISO 12100-2:2003/A1:2009 SAFETY OF MACHINERY - BASIC CONCEPTS, GENERAL PRINCIPLES FOR DESIGN - PART 2: TECHNICAL PRINCIPLES
    IEC 61496-1:2012 Safety of machinery - Electro-sensitive protective equipment - Part 1: General requirements and tests
    HD 516 S2:1997/A2:2008 GUIDE TO USE OF LOW VOLTAGE HARMONIZED CABLES
    ISO 3864-1:2011 Graphical symbols Safety colours and safety signs Part 1: Design principles for safety signs and safety markings
    IEC 60050-826:2004 International Electrotechnical Vocabulary (IEV) - Part 826: Electrical installations
    ISO 12100-1:2003 Safety of machinery Basic concepts, general principles for design Part 1: Basic terminology, methodology
    ISO 13850:2015 Safety of machinery Emergency stop function Principles for design
    IEC 60947-5-2:2007+AMD1:2012 CSV Low-voltage switchgear and controlgear - Part 5-2: Control circuitdevices and switching elements - Proximity switches
    EN 61558-2-6:2009 SAFETY OF TRANSFORMERS, REACTORS, POWER SUPPLY UNITS AND SIMILAR PRODUCTS FOR SUPPLY VOLTAGES UP TO 1100 V - PART 2-6: PARTICULAR REQUIREMENTS AND TESTS FOR SAFETY ISOLATING TRANSFORMERS AND POWER SUPPLY UNITS INCORPORATING SAFETY ISOLATING TRANSFORMERS
    IEC 61310-1:2007 Safety of machinery - Indication, marking and actuation - Part 1: Requirements for visual, acoustic and tactile signals
    IEC 60947-3:2008+AMD1:2012+AMD2:2015 CSV Low-voltage switchgear and controlgear - Part 3: Switches, disconnectors, switch-disconnectors and fuse-combination units
    IEC 61439-1:2011 Low-voltage switchgear and controlgear assemblies - Part 1: General rules
    SEMI S1 : 2015 SAFETY GUIDELINE FOR EQUIPMENT SAFETY LABELS
    EN 61010-1:2010 SAFETY REQUIREMENTS FOR ELECTRICAL EQUIPMENT FOR MEASUREMENT, CONTROL AND LABORATORY USE - PART 1: GENERAL REQUIREMENTS (IEC 61010-1:2010)
    IEC 60947-2:2016 Low-voltage switchgear and controlgear - Part 2: Circuit-breakers
    EN 60529:1991/AC:2016-12 DEGREES OF PROTECTION PROVIDED BY ENCLOSURES (IP CODE) (IEC 60529 EDITION 2.2 CORRIGENDUM 2:2015)
    IEC 62061:2005+AMD1:2012+AMD2:2015 CSV Safety of machinery - Functional safety of safety-related electrical, electronic and programmable electronic control systems
    IEC 61140:2016 Protection against electric shock - Common aspects for installation and equipment
    IEC 61032:1997 Protection of persons and equipment by enclosures - Probes for verification
    IEC 60309-1:1999+AMD1:2005+AMD2:2012 CSV Plugs, socket-outlets and couplers for industrial purposes - Part 1: General requirements
    IEC 61010-1:2010+AMD1:2016 CSV Safety requirements for electrical equipment for measurement, control, and laboratory use - Part 1: General requirements
    IEC TS 62046:2008 Safety of machinery - Application of protective equipment to detect the presence of persons
    ISO 13849-1:2015 Safety of machinery Safety-related parts of control systems Part 1: General principles for design
    EN 61310-1:2008 SAFETY OF MACHINERY - INDICATION, MARKING AND ACTUATION - PART 1: REQUIREMENTS FOR VISUAL, ACOUSTIC AND TACTILE SIGNALS
    IEC 61000-6-2 : 3.0:2016 ELECTROMAGNETIC COMPATIBILITY (EMC) - PART 6-2: GENERIC STANDARDS - IMMUNITY STANDARD FOR INDUSTRIAL ENVIRONMENTS
    IEC 60445:2017 Basic and safety principles for man-machine interface, marking and identification - Identification of equipment terminals, conductor terminations and conductors
    IEC 61557-3:2007 Electrical safety in low voltage distribution systems up to 1 000 V a.c. and 1 500 V d.c. - Equipment for testing, measuring or monitoring of protective measures - Part 3: Loop impedance
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