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EN 60204-33:2011

Current

Current

The latest, up-to-date edition.

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

Published date

04-03-2011

FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 General requirements
5 Incoming supply conductor terminations and
   devices for disconnecting and switching off
6 Protection against electric shock
7 Protection of equipment
8 Equipotential bonding
9 Control circuits, emergency off (EMO), and
   protective interlock circuits
10 Operator interfaces
11 Controlgear: location, mounting, and enclosures
12 Conductors and cables
13 Wiring practices
14 Electric motors and associated equipment
15 Accessories and lighting
16 Marking, warning signs and reference designations
17 Technical documentation
18 Testing
Annex A (normative) - Basic protection (protection
        against indirect contact) in TN-systems
Annex B (normative) - Protection against indirect contact
        in TT-systems (Derived from IEC 60364-4-41:2005
        and IEC 60364-6:2006)
Annex C (normative) - Conductor ampacity, and creepage
        and clearance distances
Annex D (normative) - Standard test fingers
Annex E (informative) - Types of system earthing (Derived
        from IEC 60364-1: 2005)
Bibliography
Annex ZA (normative) - Normative references to
         international publications with their
         corresponding European publications
Annex ZZ (informative) - Coverage of Essential Requirements
         of EC Directives

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

Committee
CLC/TC 44X
DocumentType
Standard
PublisherName
European Committee for Standards - Electrical
Status
Current

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