I.S. EN 60204-33:2011
Current
The latest, up-to-date edition.
SAFETY OF MACHINERY - ELECTRICAL EQUIPMENT OF MACHINES - PART 33: REQUIREMENTS FOR SEMICONDUCTOR FABRICATION EQUIPMENT
Hardcopy , PDF
English
01-01-2011
For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.
Only cited Standards give presumption of conformance to New Approach Directives/Regulations.
Dates of withdrawal of national standards are available from NSAI.
FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 General requirements
5 Incoming supply conductor terminations and
devices for disconnecting and switching off
6 Protection against electric shock
7 Protection of equipment
8 Equipotential bonding
9 Control circuits, emergency off (EMO), and
protective interlock circuits
10 Operator interfaces
11 Controlgear: location, mounting, and enclosures
12 Conductors and cables
13 Wiring practices
14 Electric motors and associated equipment
15 Accessories and lighting
16 Marking, warning signs and reference designations
17 Technical documentation
18 Testing
Annex A (normative) - Basic protection (protection
against indirect contact) in TN-systems
Annex B (normative) - Protection against indirect contact
in TT-systems (Derived from IEC 60364-4-41:2005
and IEC 60364-6:2006)
Annex C (normative) - Conductor ampacity, and creepage
and clearance distances
Annex D (normative) - Standard test fingers
Annex E (informative) - Types of system earthing (Derived
from IEC 60364-1: 2005)
Bibliography
Annex ZA (normative) - Normative references to
international publications with their
corresponding European publications
Annex ZZ (informative) - Coverage of Essential Requirements
of EC Directives
Pertains to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
| DevelopmentNote |
For CENELEC adoptions of IEC publications, please check www.iec.ch to be sure that you have any corrigenda that may apply. (01/2017)
|
| DocumentType |
Standard
|
| Pages |
132
|
| PublisherName |
National Standards Authority of Ireland
|
| Status |
Current
|
| Standards | Relationship |
| EN 60204-33:2011 | Identical |
| BS EN 60204-33:2011 | Equivalent |
| UNE-EN 60204-33:2011 | Equivalent |
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