EN ISO 14644-10:2013
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
01-06-2022
06-03-2013
Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Measuring and monitoring the cleanliness of
surfaces for chemical contamination and
demonstration of compliance
Annex A (informative) - Conversion between different
unit expressions of surface concentration for
chemical substances
Annex B (informative) - Parameters influencing testing
and interpretation of results
Annex C (informative) - Essential considerations for
a good cleanliness assessment
Annex D (informative) - Methods for testing surface
cleanliness by chemical concentration
Annex E (informative) - Test record documentation
Bibliography
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
| Committee |
CEN/TC 243
|
| DevelopmentNote |
Supersedes PREN ISO 14644-10. (03/2013)
|
| DocumentType |
Standard
|
| PublisherName |
Comite Europeen de Normalisation
|
| Status |
Superseded
|
| Standards | Relationship |
| NF EN ISO 14644-10:2022 | Identical |
| ONORM EN ISO 14644-10 : 2013 | Identical |
| NBN EN ISO 14644-10 : 2013 | Identical |
| I.S. EN ISO 14644-10:2013 | Identical |
| BS EN ISO 14644-10:2013 | Identical |
| DIN EN ISO 14644-10:2013-06 | Identical |
| NS EN ISO 14644-10 : 2013 | Identical |
| PN EN ISO 14644-10 : 2013 | Identical |
| UNI EN ISO 14644-10 : 2013 | Identical |
| NF EN ISO 14644-10 : 2013 | Identical |
| UNE-EN ISO 14644-10:2014 | Identical |
| NEN EN ISO 14644-10 : 2013 | Identical |
| ISO 14644-10:2013 | Identical |
| SS-EN ISO 14644-10 : 2013 | Identical |
| SN EN ISO 14644-10:2013 | Identical |
| VDI 2083 Blatt 9.2:2017-01 | Cleanroom technology - Consumables in the cleanroom |
| VDI 2083 Blatt 1:2013-01 | Cleanroom technology - Particulate air cleanliness classes |
| SEMI E46 : 2007 | TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS) |
| ISO 17052:2007 | Rubber, raw Determination of residual monomers and other volatile low-molecular-mass compounds by capillary gas chromatography Thermal desorption (dynamic headspace) method |
| ISO 14644-6:2007 | Cleanrooms and associated controlled environments Part 6: Vocabulary |
| ISO 14644-8:2013 | Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC) |
| ISO 18115-1:2013 | Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy |
| ISO 18116:2005 | Surface chemical analysis — Guidelines for preparation and mounting of specimens for analysis |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
| ISO 10312:1995 | Ambient air Determination of asbestos fibres Direct transfer transmission electron microscopy method |
| ISO 14644-9:2012 | Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration |
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