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  • EN ISO 14644-10:2013

    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

    Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)

    Available format(s): 

    Superseded date:  01-06-2022

    Language(s): 

    Published date:  06-03-2013

    Publisher:  Comite Europeen de Normalisation

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    Table of Contents - (Show below) - (Hide below)

    Foreword
    1 Scope
    2 Normative references
    3 Terms and definitions
    4 Classification
    5 Measuring and monitoring the cleanliness of
      surfaces for chemical contamination and
      demonstration of compliance
    Annex A (informative) - Conversion between different
            unit expressions of surface concentration for
            chemical substances
    Annex B (informative) - Parameters influencing testing
            and interpretation of results
    Annex C (informative) - Essential considerations for
            a good cleanliness assessment
    Annex D (informative) - Methods for testing surface
            cleanliness by chemical concentration
    Annex E (informative) - Test record documentation
    Bibliography

    Abstract - (Show below) - (Hide below)

    ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

    General Product Information - (Show below) - (Hide below)

    Committee CEN/TC 243
    Development Note Supersedes PREN ISO 14644-10. (03/2013)
    Document Type Standard
    Publisher Comite Europeen de Normalisation
    Status Superseded

    Standards Referenced By This Book - (Show below) - (Hide below)

    VDI 2083 Blatt 9.2:2017-01 Cleanroom technology - Consumables in the cleanroom
    VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI E46 : 2007 TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS)
    ISO 17052:2007 Rubber, raw Determination of residual monomers and other volatile low-molecular-mass compounds by capillary gas chromatography Thermal desorption (dynamic headspace) method
    ISO 14644-6:2007 Cleanrooms and associated controlled environments Part 6: Vocabulary
    ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
    ISO 18115-1:2013 Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy
    ISO 18116:2005 Surface chemical analysis Guidelines for preparation and mounting of specimens for analysis
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    ISO 10312:1995 Ambient air Determination of asbestos fibres Direct transfer transmission electron microscopy method
    ISO 14644-9:2012 Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration
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