EN ISO 14644-8:2013
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013)
31-08-2013
20-02-2013
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Demonstration of compliance
Annex A (informative) - Parameters for consideration
Annex B (informative) - Typical contaminants
Annex C (informative) - Typical methods of measurement
Annex D (informative) - Consideration of specific
requirements for separative devices
Bibliography
ISO 14644-8:2013 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.ISO 14644-8:2013 currently considers only concentrations of air chemical contaminants between 100 and 10−12 g/m3 under cleanroom operational conditions.ISO 14644-8:2013 is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.It is not the intention of ISO 14644-8:2013 to describe the nature of air chemical contaminants.ISO 14644-8:2013 does not give a classification of surface chemical contamination.
Committee |
CEN/TC 243
|
DevelopmentNote |
Supersedes PREN ISO 14644-8. (03/2013)
|
DocumentType |
Standard
|
PublisherName |
Comite Europeen de Normalisation
|
Status |
Withdrawn
|
Supersedes |
Standards | Relationship |
ONORM EN ISO 14644-8 : 2013 | Identical |
DIN EN ISO 14644-8:2013-06 | Identical |
UNE-EN ISO 14644-8:2014 | Identical |
PN EN ISO 14644-8 : 2013 | Identical |
SN EN ISO 14644-8 : 2013 | Identical |
NF EN ISO 14644-8 : 2013 | Identical |
NEN EN ISO 14644-8 : 2013 | Identical |
I.S. EN ISO 14644-8:2013 | Identical |
NS EN ISO 14644-8 : 2013 | Identical |
NBN EN ISO 14644-8 : 2013 | Identical |
SS-EN ISO 14644-8 : 2013 | Identical |
ISO 14644-8:2013 | Identical |
BS EN ISO 14644-8:2013 | Identical |
UNI EN ISO 14644-8 : 2013 | Identical |
VDI 2083 Blatt 17:2013-06 | Cleanroom technology - Compatibility of materials with the required cleanliness |
VDI 2083 Blatt 15:2007-04 | Cleanroom technology - Personnel at the clean work place |
VDI 2083 Blatt 9.2:2017-01 | Cleanroom technology - Consumables in the cleanroom |
VDI 2083 Blatt 8.1:2014-10 | Cleanroom technology - Air cleanliness chemical concentration (ACC) |
VDI 2083 Blatt 1:2013-01 | Cleanroom technology - Particulate air cleanliness classes |
SEMI E45 : NOV 2001(R2007) | TEST METHOD FOR THE DETERMINATION OF INORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING VAPOR PHASE DECOMPOSITION-TOTAL REFLECTION X-RAY SPECTROSCOPY (VPD-TXRF) AND VAPOR PHASE DECOMPOSITION-ATOMIC ABSORPTION SPECTROSCOPY (VPD/ICP-MS) |
SEMI E46 : 2007 | TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS) |
ISO 14644-6:2007 | Cleanrooms and associated controlled environments Part 6: Vocabulary |
ISO 14644-5:2004 | Cleanrooms and associated controlled environments — Part 5: Operations |
ISO 14644-7:2004 | Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) |
IEST G CC035.1 : 2009 | DESIGN CONSIDERATIONS FOR AIRBORNE MOLECULAR CONTAMINATION FILTRATION SYSTEMS IN CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS |
ISO 14644-4:2001 | Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up |
SEMI F21 : 2016 | CLASSIFICATION OF AIRBORNE MOLECULAR CONTAMINANT LEVELS IN CLEAN ENVIRONMENTS |
IEST RP CC031.2 : 2008 | METHOD FOR CHARACTERIZING OUTGASSED ORGANIC COMPOUNDS FROM CLEANROOM MATERIALS AND COMPONENTS |
SEMI E108 : 2007 | TEST METHOD FOR THE ASSESSMENT OF OUTGASSING ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING GAS CHROMATOGRAPHY/MASS SPECTROSCOPY |
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