I.S. EN 61094-6:2005

FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Reference environmental conditions
5 Principle of electrostatic actuator operation
  5.1 General
  5.2 Electrostatic pressure
  5.3 Electrostatic actuator response
6 Actuator design
  6.1 General
  6.2 Design
7 Validation
  7.1 General
  7.2 Repeatability of measurements
  7.3 Uniformity of actuators of a given model
  7.4 Uniformity of the difference between actuator and
      pressure response levels
8 Measurement of electrostatic actuator response
  8.1 System for measurement of electrostatic actuator
      response
  8.2 Uncertainty components
9 Applications of an electrostatic actuator
  9.1 General
  9.2 Verification of the frequency response of a measurement
      system
  9.3 Determination of the environmental characteristics of
      microphone measurement systems
  9.4 Determination of free-field and pressure frequency
      responses
  9.5 Measurement of actuator response at very high
      frequencies
Annex A (informative) Examples of electrostatic actuator
                       designs
Annex B (informative) Set-up for measuring electrostatic
                       actuator response
Annex C (informative) Typical uncertainty analysis
Annex D (informative) Difference between free-field-,
                       pressure- and actuator responses
                       for typical models of measurement
                       microphones
Figures
Table

Provides: - guidelines for the design of actuators for microphones equipped with electrically conductive diaphragms; - methods for the validation of electrostatic actuators; - method for determining the electrostatic actuator response of a microphone.