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    I.S. EN ISO 25178-603:2013

    Current The latest, up-to-date edition.

    GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 603: NOMINAL CHARACTERISTICS OF NON-CONTACT (PHASE-SHIFTING INTERFEROMETRIC MICROSCOPY) INSTRUMENTS (ISO 25178-603:2013)

    Available format(s):  Hardcopy, PDF

    Language(s):  English

    Published date:  01-01-2013

    Publisher:  National Standards Authority of Ireland

    For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.
    Only cited Standards give presumption of conformance to New Approach Directives/Regulations.

    Dates of withdrawal of national standards are available from NSAI.

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    Table of Contents - (Show below) - (Hide below)

    Foreword
    Introduction
    1 Scope
    2 Terms and definitions
    3 Descriptions of the influence quantities
    Annex A (informative) - Components of a phase-shifting
            interferometric (PSI) microscope
    Annex B (informative) - Phase-shifting interferometric
            (PSI) microscope - Theory of operation
    Annex C (informative) - Errors and corrections for
            phase-shifting interferometric (PSI) microscopes
    Annex D (informative) - Relation to the GPS
            matrix model
    Bibliography

    Abstract - (Show below) - (Hide below)

    Defines the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

    General Product Information - (Show below) - (Hide below)

    Document Type Standard
    Publisher National Standards Authority of Ireland
    Status Current

    Standards Referencing This Book - (Show below) - (Hide below)

    ISO/TR 14638:1995 Geometrical product specification (GPS) Masterplan
    ISO 8015:2011 Geometrical product specifications (GPS) Fundamentals Concepts, principles and rules
    ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
    ISO 14978:2006 Geometrical product specifications (GPS) General concepts and requirements for GPS measuring equipment
    ISO 25178-6:2010 Geometrical product specifications (GPS) Surface texture: Areal Part 6: Classification of methods for measuring surface texture
    ISO 10934-2:2007 Optics and optical instruments Vocabulary for microscopy Part 2: Advanced techniques in light microscopy
    ISO 14253-1:2017 Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications
    ISO 25178-3:2012 Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators
    ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and associated terms (VIM)
    ISO 25178-601:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments
    ISO 25178-602:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
    ISO 25178-2:2012 Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters
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