IEC 62047-28:2017
Current
The latest, up-to-date edition.
Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices
Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users
English
20-01-2017
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FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Vibration testing equipment
5 Vibration-driven MEMS energy harvesting devices
for testing
6 Test conditions
7 Measuring procedures
8 Test report
Annex A (informative) - Example of measurement for
electret energy harvester
Bibliography
IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.
| DevelopmentNote |
Stability Date: 2021. (01/2017)
|
| DocumentType |
Standard
|
| Pages |
17
|
| PublisherName |
International Electrotechnical Committee
|
| Status |
Current
|
| Standards | Relationship |
| JIS C 5630-28:2020 | Identical |
| PNE-FprEN 62047-28:2016 | Identical |
| BS IEC 62047-28:2017 | Identical |
| IEC 60749-12:2002 | Semiconductor devices - Mechanical and climatic test methods - Part 12: Vibration, variable frequency |
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