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  • IEC/IEEE 62659:2015

    Current The latest, up-to-date edition.

    Nanomanufacturing - Large scale manufacturing for nanoelectronics

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    Published date:  30-09-2015

    Publisher:  International Electrotechnical Committee

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    Table of Contents - (Show below) - (Hide below)

    FOREWORD
    INTRODUCTION
    1 Scope
    2 Normative references
    3 Terms and definitions
    4 Abbreviations
    5 Nanomaterials incorporation into
      electronics fabrication
    6 Safety and environmental issues
    Bibliography

    Abstract - (Show below) - (Hide below)

    IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.

    General Product Information - (Show below) - (Hide below)

    Development Note Jointly published by IEC & IEEE. (10/2015)
    Document Type Standard
    Publisher International Electrotechnical Committee
    Status Current

    Standards Referencing This Book - (Show below) - (Hide below)

    ISO 14644-6:2007 Cleanrooms and associated controlled environments Part 6: Vocabulary
    ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
    ISO/TS 80004-3:2010 Nanotechnologies Vocabulary Part 3: Carbon nano-objects
    ISO 14698-2:2003 Cleanrooms and associated controlled environments Biocontamination control Part 2: Evaluation and interpretation of biocontamination data
    ISO 14644-2:2015 Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
    ISO/TS 27687:2008 Nanotechnologies Terminology and definitions for nano-objects Nanoparticle, nanofibre and nanoplate
    ISO 14644-5:2004 Cleanrooms and associated controlled environments — Part 5: Operations
    IEC 62624:2009 Test methods for measurement of electrical properties of carbon nanotubes
    ISO 14698-1:2003 Cleanrooms and associated controlled environments Biocontamination control Part 1: General principles and methods
    IEC PAS 62565-2-1:2011 Nanomanufacturing - Material specifications - Part 2-1: Single-wall carbon nanotubes - Blank detail specification
    ISO 14644-3:2005 Cleanrooms and associated controlled environments Part 3: Test methods
    ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    ISO/TS 80004-1:2015 Nanotechnologies — Vocabulary — Part 1: Core terms
    ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
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