Foreword
Introduction
1 Scope
2 Normative references
3 Definitions
4 Recipe description
4.1 Recipe types
4.2 General and site recipe description
4.3 Equipment-independent recipes
4.4 General recipes
4.5 Site recipes
4.6 Product families and product grades
5 Equipment-independent recipe contents
5.1 Recipe information
5.2 Recipe life cycle states
5.3 Recipe header
5.4 Recipe formula
5.5 Recipe procedure
5.6 Equipment requirements
5.7 Other information
5.8 Life cycle states
6 Equipment-independent recipe object model
6.1 Introduction
6.2 Modeling techniques
6.3 Object model
6.4 Object relationships
6.5 Object model elements
7 Equipment-independent recipe representation
7.1 Process procedure chart
7.2 Process procedure chart notation
7.3 Process hierarchy
8 Transformation of equipment-independent recipes to
master recipes
8.1 Source of information for master recipes
8.2 Element mapping
8.3 Stage-to-unit procedure mapping
8.4 Transform components
8.5 Transformation tasks
8.6 Transformation mapping
Annex A (informative) - General and site recipe benefits
Annex B (informative) - General and site recipes in the enterprise
Annex C (informative) - Usage questions
Annex D (informative) - Bibliography