ISO 11039:2012
Current
The latest, up-to-date edition.
Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate
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English
23-01-2012
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ISO 11039:2012 defines terms and specifies measurement methods for characterizing the drift rates of scanning-probe microscopy (SPM) instruments in the X- and Y-directions and, for SPM instruments measuring topography, the drift rate in the Z-direction. Though the behaviour of the long-term drift rate might be nonlinear, both that and the behaviour of the short-term drift rate after a user-defined settling time can be characterized by either typical average or typical maximum drift rates.
This International Standard is suitable for evaluating the drift rate based on SPM images. It is intended to help manufacturers quote drift figures in specifications in a meaningful and consistent manner and to aid users to characterize the drift behaviour so that effective experiments can be designed. These measurements are not designed for image correction.
| DevelopmentNote |
Supersedes ISO/DIS 11039. (01/2012)
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| DocumentType |
Standard
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| Pages |
19
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| PublisherName |
International Organization for Standardization
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| Status |
Current
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| Standards | Relationship |
| BS ISO 11039:2012 | Identical |
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| ISO 11952:2014 | Surface chemical analysis Scanning-probe microscopy Determination of geometric quantities using SPM: Calibration of measuring systems |
| ISO 13095:2014 | Surface Chemical Analysis Atomic force microscopy Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement |
| ISO/TR 18196:2016 | Nanotechnologies — Measurement technique matrix for the characterization of nano-objects |
| BS ISO 19606:2017 | Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for surface roughness of fine ceramic films by atomic force microscopy |
| ISO 19606:2017 | Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy |
| ISO 18115-2:2013 | Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy |
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