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CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 2: MONITORING TO PROVIDE EVIDENCE OF CLEANROOM PERFORMANCE RELATED TO AIR CLEANLINESS BY PARTICLE CONCENTRATION
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Published date: 12-01-2013
Publisher: Netherlands Standards
ForewordIntroduction1 Scope2 Normative references3 Terms and definitions 3.1 General terms 3.2 Terms concerning frequency intervals4 Demonstration of continued compliance 4.1 Principle 4.2 Testing for continued compliance 4.3 Monitoring 4.4 Documentation 4.5 RecordsAnnex A (informative) Optional testsAnnex B (informative) Guidance on the influence of risk assessment on cleanroom or clean zone tests and monitoring
Defines minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
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