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ISO 14701:2011

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

View Superseded by

Surface chemical analysis X-ray photoelectron spectroscopy Measurement of silicon oxide thickness

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Withdrawn date

30-03-2019

Superseded by

ISO 14701:2018

Language(s)

English

Published date

02-08-2011

€60.00
Excluding VAT

ISO 14701:2011 specifies several methods for measuring the oxide thickness at the surfaces of (100) and (111) silicon wafers as an equivalent thickness of silicon dioxide when measured using X-ray photoelectron spectroscopy. It is only applicable to flat, polished specimens and for instruments that incorporate an Al or Mg X-ray source, a specimen stage that permits defined photoelectron emission angles and a spectrometer with an input lens that can be restricted to less than a 6 cone semi-angle. For thermal oxides in the range 1 nm to 8 nm thickness, using the best method described in the standard, uncertainties, at a 95 % confidence level, could typically be around 2 % and around 1 % at optimum. A simpler method is also given with slightly poorer, but often adequate, uncertainties.

DevelopmentNote
DRAFT ISO/DIS 14701 is also available for this standard. (11/2017)
DocumentType
Standard
Pages
15
PublisherName
International Organization for Standardization
Status
Withdrawn
SupersededBy

Standards Relationship
BS ISO 14701:2011 Identical
NEN ISO 14701 : 2011 Identical
BS ISO 14701:2018 Identical

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ASTM E 2735 : 2014 : REDLINE Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments
ISO/IEC 17826:2016 Information technology Cloud Data Management Interface (CDMI)
16/30334095 DC : 0 BS ISO/IEC 17826 - INFORMATION TECHNOLOGY - CLOUD DATA MANAGEMENT INTERFACE (CDMI)
CAN/CSA-ISO/IEC 17826:18 Information technology — Cloud Data Management Interface (CDMI) (Adopted ISO/IEC 17826:2016, second edition, 2016-07-15)

ISO 18116:2005 Surface chemical analysis — Guidelines for preparation and mounting of specimens for analysis
ISO/TR 18392:2005 Surface chemical analysis X-ray photoelectron spectroscopy Procedures for determining backgrounds
ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)

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