ISO 16413:2013
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
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Evaluation of thickness, density and interface width of thin films by X-ray reflectometry Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
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17-08-2020
English
12-02-2013
ISO 16413:2013 specifies a method for the evaluation of thickness, density and interface width of single layer and multilayered thin films which have thicknesses between approximately 1 nm and 1 m, on flat substrates, by means of X-Ray Reflectometry (XRR).
This method uses a monochromatic, collimated beam, scanning either an angle or a scattering vector. Similar considerations apply to the case of a convergent beam with parallel data collection using a distributed detector or to scanning wavelength, but these methods are not described here. While mention is made of diffuse XRR, and the requirements for experiments are similar, this is not covered in the present document.
Measurements may be made on equipment of various configurations, from laboratory instruments to reflectometers at synchrotron radiation beamlines or automated systems used in industry.
Attention should be paid to an eventual instability of the layers over the duration of the data collection, which would cause a reduction in the accuracy of the measurement results. Since XRR, performed at a single wavelength, does not provide chemical information about the layers, attention should be paid to possible contamination or reactions at the specimen surface. The accuracy of results for the outmost layer is strongly influenced by any changes at the surface.
DevelopmentNote |
Supersedes ISO/DIS 16413. (02/2013)
|
DocumentType |
Standard
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Pages |
30
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PublisherName |
International Organization for Standardization
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Status |
Withdrawn
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SupersededBy |
Standards | Relationship |
NEN ISO 16413 : 2013 | Identical |
BS ISO 16413:2013 | Identical |
ISO/IEC Guide 98-3:2008 | Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) |
ISO 25178-2:2012 | Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters |
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