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ISO 16413:2013

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

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Evaluation of thickness, density and interface width of thin films by X-ray reflectometry Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Withdrawn date

17-08-2020

Superseded by

ISO 16413:2020

Language(s)

English

Published date

12-02-2013

€60.00
Excluding VAT

ISO 16413:2013 specifies a method for the evaluation of thickness, density and interface width of single layer and multilayered thin films which have thicknesses between approximately 1 nm and 1 m, on flat substrates, by means of X-Ray Reflectometry (XRR).

This method uses a monochromatic, collimated beam, scanning either an angle or a scattering vector. Similar considerations apply to the case of a convergent beam with parallel data collection using a distributed detector or to scanning wavelength, but these methods are not described here. While mention is made of diffuse XRR, and the requirements for experiments are similar, this is not covered in the present document.

Measurements may be made on equipment of various configurations, from laboratory instruments to reflectometers at synchrotron radiation beamlines or automated systems used in industry.

Attention should be paid to an eventual instability of the layers over the duration of the data collection, which would cause a reduction in the accuracy of the measurement results. Since XRR, performed at a single wavelength, does not provide chemical information about the layers, attention should be paid to possible contamination or reactions at the specimen surface. The accuracy of results for the outmost layer is strongly influenced by any changes at the surface.

DevelopmentNote
Supersedes ISO/DIS 16413. (02/2013)
DocumentType
Standard
Pages
30
PublisherName
International Organization for Standardization
Status
Withdrawn
SupersededBy

Standards Relationship
NEN ISO 16413 : 2013 Identical
BS ISO 16413:2013 Identical

ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)
ISO 25178-2:2012 Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters

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