Surface chemical analysis — Vocabulary — Part 2: Terms used in scanning-probe microscopy

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Published date

21-12-2021

Publisher

International Organization for Standardization

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This document defines terms for surface chemical analysis. ISO18115-1 covers general terms and those used in spectroscopy while this document covers terms used in scanning probe microscopy.

DocumentType	Standard
Pages	45
PublisherName	International Organization for Standardization
Status	Current
Supersedes	ISO 18115-2:2013

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ISO 18115-2:2021

Surface chemical analysis — Vocabulary — Part 2: Terms used in scanning-probe microscopy

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ISO 18115-2:2021

Surface chemical analysis — Vocabulary — Part 2: Terms used in scanning-probe microscopy

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