ISO/TR 19319:2013
Current
The latest, up-to-date edition.
Surface chemical analysis Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
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English
06-03-2013
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ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.
| DocumentType |
Technical Report
|
| Pages |
116
|
| PublisherName |
International Organization for Standardization
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| SAC GB/T 29556 : 2013 | Identical |
| PD ISO/TR 19319:2013 | Identical |
| NEN NPR ISO/TR 19319 : 2004 | Identical |
| PD ISO/TR 18196:2016 | Nanotechnologies. Measurement technique matrix for the characterization of nano-objects |
| BS ISO 18516:2006 | Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution |
| BS ISO 15471:2004 | Surface chemical analysis. Auger electron spectroscopy. Description of selected instrumental performance parameters |
| ISO/TR 10993-22:2017 | Biological evaluation of medical devices — Part 22: Guidance on nanomaterials |
| ISO 18516:2006 | Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution |
| 09/30184131 DC : 0 | BS ISO 29081 - SURFACE CHEMICAL ANALYSIS - AUGER ELECTRON SPECTROSCOPY - REPORTING OF METHODS USED FOR CHARGE CONTROL AND CHARGE CORRECTION |
| ASTM E 2735 : 2014 : REDLINE | Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments |
| PD ISO/TR 14187:2011 | Surface chemical analysis. Characterization of nanostructured materials |
| BS ISO 29081:2010 | Surface chemical analysis. Auger electron spectroscopy. Reporting of methods used for charge control and charge correction |
| ISO 15471:2016 | Surface chemical analysis Auger electron spectroscopy Description of selected instrumental performance parameters |
| 09/30191895 DC : 0 | BS ISO 10810 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - GUIDELINES FOR ANALYSIS |
| ISO/TR 18196:2016 | Nanotechnologies — Measurement technique matrix for the characterization of nano-objects |
| ISO 29081:2010 | Surface chemical analysis Auger electron spectroscopy Reporting of methods used for charge control and charge correction |
| PD ISO/TR 10993-22:2017 | Biological evaluation of medical devices Guidance on nanomaterials |
| ISO/TR 14187:2011 | Surface chemical analysis Characterization of nanostructured materials |
| ISO 22493:2014 | Microbeam analysis — Scanning electron microscopy — Vocabulary |
| ISO 9335:2012 | Optics and photonics — Optical transfer function — Principles and procedures of measurement |
| ISO 18516:2006 | Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution |
| ASTM E 1217 : 2011 : REDLINE | Standard Practice for Determination of the Specimen Area Contributing to the Detected Signal in Auger Electron Spectrometers and Some X-Ray Photoelectron Spectrometers |
| ISO 9334:2007 | Optics and photonics Optical transfer function Definitions and mathematical relationships |
| ISO/IEC Guide 98-3:2008 | Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) |
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