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NF EN 62047-13 : 2012

Current

Current

The latest, up-to-date edition.

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 13: BEND- AND SHEAR-TYPE TEST METHODS OF MEASURING ADHESIVE STRENGTH FOR MEMS STRUCTURES

Published date

12-01-2013

DevelopmentNote
Indice de classement: C96-050-13. PR NF EN 62047-13 August 2012. (08/2012)
DocumentType
Standard
PublisherName
Association Francaise de Normalisation
Status
Current

Standards Relationship
IEC 62047-13:2012 Identical
EN 62047-13:2012 Identical

IEC 62047-2:2006 Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials

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