NF EN 62047-14 : 2012
Current
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 14: FORMING LIMIT MEASURING METHOD OF METALLIC FILM MATERIALS
Published date
12-01-2013
Publisher
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| DevelopmentNote |
Indice de classement: C96-050-14. PR NF EN 62047-14 August 2012. (08/2012)
|
| DocumentType |
Standard
|
| PublisherName |
Association Francaise de Normalisation
|
| Status |
Current
|
| Standards | Relationship |
| IEC 62047-14:2012 | Identical |
| EN 62047-14:2012 | Identical |
| IEC 62047-1:2016 | Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions |
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