NF EN 62047-16 : 2015
Current
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 16: TEST METHODS FOR DETERMINING RESIDUAL STRESSES OF MEMS FILMS - WAFER CURVATURE AND CANTILEVER BEAM DEFLECTION METHODS
Published date
16-11-2015
Publisher
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| DevelopmentNote |
Indice de classement: C96-050-16. (11/2015)
|
| DocumentType |
Standard
|
| PublisherName |
Association Francaise de Normalisation
|
| Status |
Current
|
| Standards | Relationship |
| IEC 62047-16:2015 | Identical |
| EN 62047-16:2015 | Identical |
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