NF EN 62047-3 : 2006
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 3: THIN FILM STANDARD TEST PIECE FOR TENSILE TESTING
12-01-2013
AVANT-PROPOS
1 Domaine d'application
2 Références normatives
3 Matériaux des éprouvettes d'essai
4 Fabrications des éprouvettes d'essai
5 Forme plane de l'éprouvette d'essai
6 Epaisseur de l'éprouvette d'essai
7 Marque repère
8 Essai
9 Document joint aux éprouvettes d'essai normalisées
Annexe A (informative) Eprouvette d'essai
Annexe ZA (normative) Références normatives à d'autres
publications internationales avec les
publications européennes correspondantes
Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10[mu]m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices.
| DevelopmentNote |
Indice de classement: C96-050-3 PR NF EN 62047-3 June 2005. (06/2005)
|
| DocumentType |
Standard
|
| PublisherName |
Association Francaise de Normalisation
|
| Status |
Current
|
| Standards | Relationship |
| DIN EN 62047-3:2007-02 | Identical |
| IEC 62047-3:2006 | Identical |
| EN 62047-3 : 2006 | Identical |
| I.S. EN 62047-3:2006 | Identical |
| BS EN 62047-3:2006 | Identical |
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