NF EN 62047-6 : 2010
Current
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 6: AXIAL FATIGUE TESTING METHODS OF THIN FILM MATERIALS
Published date
12-01-2013
Publisher
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| DevelopmentNote |
Indice de classement: C96-050-6. PR NF EN 62047-6 March 2009. (03/2009)
|
| DocumentType |
Standard
|
| PublisherName |
Association Francaise de Normalisation
|
| Status |
Current
|
| Standards | Relationship |
| EN 62047-6:2010 | Identical |
| IEC 62047-6:2009 | Identical |
| IEC 62047-2:2006 | Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials |
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