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  • NF EN 62047-9 : 2012

    Current The latest, up-to-date edition.

    SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 9: WAFER TO WAFER BONDING STRENGTH MEASUREMENT FOR MEMS

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    Published date:  12-01-2013

    Publisher:  Association Francaise de Normalisation

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    Development Note Indice de classement: C96-050-9. PR NF EN 62047-9 January 2010. (02/2010)
    Document Type Standard
    Publisher Association Francaise de Normalisation
    Status Current
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