NFPA 318:2022

Chapter 1 Administration
1.1 Scope.
1.2 Purpose.
1.3 Retroactivity.
1.4 Equivalency.
1.5 Units.
Chapter 2 Referenced Publications
2.1 General.
2.2 NFPA Publications.
2.3 Other Publications.
2.4 References for Extracts in Mandatory Sections.
Chapter 3 Definitions
3.1 General.
3.2 NFPA Official Definitions.
3.3 General Definitions.
Chapter 4 Building Construction and Related Services
4.1 General.
4.2 Classification of Occupancy.
4.3 Noncombustible Construction Components.
4.4 Fire Resistance Rating.
4.5 Pass-Throughs in Existing Exit Access Corridors.
4.6 Vertical Openings.
4.7 Air Supply and Recirculation Systems.
4.8 Electrical Classification.
4.9 Emergency Power System.
4.10 Means of Egress.
Chapter 5 Hazardous Materials — General Provisions
5.1 Hazardous Chemicals.
5.2 HPM Risk Assessment.
5.3 Container Delivery.
5.4 Storage and Handling of Hazardous Chemicals.
5.5 Separation of Hazardous Chemicals.
5.6 Systems, Equipment, and Processes.
5.7 Supply Piping.
5.8 Welding.
Chapter 6 Liquid Chemical Storage and Handling
6.1 General.
6.2 Flammable and Combustible Liquid Delivery Systems.
6.3 Spill Protection.
6.4 Pyrophoric Liquids.
6.5 Corrosive Liquids.
6.6 Toxic and Highly Toxic Materials.
6.7 Water Reactive Chemistries.
6.8 Oxidizers.
Chapter 7 Gas Storage and Handling
7.1 General.
7.2 Corrosive Gases.
7.3 Flammable Gases.
7.4 Oxidizing Gases.
7.5 Pyrophoric Gases.
7.6 Silane Systems.
7.7 Toxic and Highly Toxic Gases.
7.8 Unstable Reactive Gases.
7.9 Cryogenic Fluids.
7.10 Bulk Oxygen Systems.
7.11 Gaseous Hydrogen Systems.
7.12 Liquefied Hydrogen Systems.
7.13 Gas Generation Systems.
7.14 Dopant Gas Sources.
Chapter 8 Production and Support Equipment
8.1 General.
8.2 Materials of Construction.
8.3 Equipment Safety Systems and Interlocks.
8.4 Electrical Design.
8.5 Process Liquid Heating Equipment.
8.6 General Requirements for Tools Using Flammable or Combustible Liquids.
8.7 Photolithography Tools.
8.8 Ion Implanters.
8.9 Wet Process and Wet Etch Tools.
8.10 CVD and Furnace Tools.
8.11 Automated Materials Handling Systems (AMHS).
8.12 Support Equipment.
8.13 Production Equipment Fire Protection.
8.14 Exposures.
Chapter 9 Exhaust Systems
9.1 General Exhaust Conditions.
9.2 Local Hazardous Chemical Exhaust System.
9.3 Local Hazardous Chemical Exhaust System Construction.
9.4 Hazardous Chemical Exhaust Duct Airflow and Dilution.
9.5 Exhaust Ducts.
9.6 Hazardous Chemical Exhaust Controls.
Chapter 10 Waste Treatment
10.1 Waste Recovery and Handling Systems.
10.2 Acid Waste Treatment Facility Safeguards.
10.3 Organic Waste Treatment Facilities.
10.4 Waste Liquid Handling.
10.5 Effluent Treatment Systems.
10.6 Scrubbers.
10.7 Vapor Recovery and Vapor Processing Systems.
Chapter 11 Fire Protection
11.1 Facility-Wide Systems.
11.2 Protection of Specific Facility Elements.
Chapter 12 General Safety Precautions
12.1 Emergency Plan.
12.2 Emergency Response Team.
12.3 Emergency Drills.
Annex A Explanatory Material
Annex B Seismic Protection
Annex C Production and Support Equipment
Annex D Informational References

This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defined as a cleanroom or clean zone, or both.