PNE-FprEN 62047-16
Current
Current
The latest, up-to-date edition.
Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films – Wafer curvature and cantilever beam deflection methods
Published date
21-07-2015
Publisher
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| Committee |
CTN 209/SC 47
|
| DocumentType |
Standard
|
| PublisherName |
Asociacion Espanola de Normalizacion
|
| Status |
Current
|
| Standards | Relationship |
| EN 62047-16:2015 | Identical |
| IEC 62047-16:2015 | Identical |
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