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PNE-prEN 62047-6

Current

Current

The latest, up-to-date edition.

Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials

Published date

11-05-2010

Committee
CTN 209/SC 47
DocumentType
Standard
PublisherName
Asociacion Espanola de Normalizacion
Status
Current

Standards Relationship
EN 62047-6:2010 Identical
IEC 62047-6:2009 Identical

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