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SEMI 3D16:2022

Current

Current

The latest, up-to-date edition.

Specification for Glass Base Material for Semiconductor Packaging

Available format(s)

Hardcopy

Language(s)

English

Published date

01-08-2022

This Specification is intended to address the needs of the 3D Stacked IC (3DS-IC) industry by providing the tools needed to procure glass as base material to be used in a 3DS-IC process or in similar applications.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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