![header thumbnail](/images/publishers\semi_cover.gif)
SEMI 3D3:2023
Current
Current
The latest, up-to-date edition.
![header thumbnail](/images/publishers\semi_cover.gif)
Guide for Multiwafer Transport and Storage Containers for 300 mm, Thin Silicon Wafers on Tape Frames
Available format(s)
Hardcopy
Language(s)
English
Published date
01-11-2023
This Guide provides the user with information about containers needed to ship thin wafers that are mounted on dicing tape to tape frames conforming to either SEMI G74 or SEMI G87.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.