SEMI 3D3:2023
Current
Current
The latest, up-to-date edition.
Guide for Multiwafer Transport and Storage Containers for 300 mm, Thin Silicon Wafers on Tape Frames
Available format(s)
Hardcopy
Language(s)
English
Published date
01-11-2023
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Guide provides the user with information about containers needed to ship thin wafers that are mounted on dicing tape to tape frames conforming to either SEMI G74 or SEMI G87.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI G94:2013 | SPECIFICATION FOR COIN-STACK TYPE TAPE FRAME SHIPPING CONTAINER FOR 300 MM WAFER |
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