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SEMI G94:2013

SEMI G94:2013

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATION FOR COIN-STACK TYPE TAPE FRAME SHIPPING CONTAINER FOR 300 MM WAFER

Superseded date

15-12-2023

Published date

07-02-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (01/2013)
DocumentType
Revision
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI 3D3:2013 GUIDE FOR MULTIWAFER TRANSPORT AND STORAGE CONTAINERS FOR 300 MM, THIN SILICON WAFERS ON TAPE FRAMES
SEMI 3D3:2013(R2018) Guide for Multiwafer Transport and Storage Containers for 300 mm, Thin Silicon Wafers on Tape Frames
SEMI 3D3:2023 Guide for Multiwafer Transport and Storage Containers for 300 mm, Thin Silicon Wafers on Tape Frames

SEMI G74 : 1999(R2015) SPECIFICATION FOR TAPE FRAME FOR 300 MM WAFERS
SEMI G87 : 2008(R2015) SPECIFICATION FOR PLASTIC TAPE FRAME FOR 300 MM WAFER

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