SEMI 3D9 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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GUIDE FOR DESCRIBING MATERIALS PROPERTIES FOR A 300 MM 3DS-IC WAFER STACK
Superseded date
05-10-2020
Published date
06-10-2014
Pertains to address the needs of the 3D Stacked IC (3DS-IC) industry by providing the tools needed to procure wafer stacks to be used in a 3DS-IC process.
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