SEMI C1.26 : 1992

Specific to 1,1,1 Trichloroethane, Furnace Grade (Provisional). Suppliers recognizing the importance of impurity content of chemicals in the manufacture of semiconductors, responded by introducing products with improved analytical characterization, notably for trace elements. Products within all of the requirements can be described as "meeting SEMI specification." Where analytical procedure differs from that provided and is substituted by a user or supplier, the burden of proof is on said user or supplier to confirm the equivalency. The Process Chemicals Committee is continuing work on improvement of procedures and specifications and addition of other reagents such as mixed etchants. The Committee welcomes suggestions, comments, and recommendations.