SEMI C1-6 : 1996
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
STANDARD FOR DICHLOROMETHANE (METHYLENE CHLORIDE)
01-03-2000
12-01-2013
Intended to establish the general procedures, specifications, definitions, and analytical procedures for dichloromethane (methylene chloride). Products within all of the requirements can be described as "meeting SEMI specifications." Where analytical procedure differs from that provided and is substituted by a user or supplier, the burden of proof is on said user or supplier to confirm the equivalency.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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