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SEMI C70 : 2016

SEMI C70 : 2016

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR TUNGSTEN HEXAFLUORIDE

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives specifications for tungsten hexafluoride (WF[6]) that are used in the semiconductor industry.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (07/2011)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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