SEMI C36 : 2013
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATIONS FOR PHOSPHORIC ACID
Superseded date
06-12-2021
Published date
12-01-2013
Describes requirements for phosphoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.
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