SEMI C36 : 2013
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATIONS FOR PHOSPHORIC ACID
Superseded date
06-12-2021
Superseded by
Published date
12-01-2013
Describes requirements for phosphoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C1.13, SEMI C1.27 & SEMI C7.24. (03/2005)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| SEMI PV12 : 2015 | SPECIFICATION FOR PHOSPHORIC ACID USED IN PHOTOVOLTAIC APPLICATIONS |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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