SEMI C55 : 2004(R2018)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR LIQUID CARBON DIOXIDE (CO[2]) USED IN NEAR CRITICAL, CRITICAL AND SUPERCRITICAL APPLICATIONS, >/ 99.99% QUALITY
Published date
12-01-2013
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Gives a specification for liquid carbon dioxide (CO[2]) that is used in near critical, critical and supercritical applications in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2004)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
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