SEMI C55 : 2004(R2018)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR LIQUID CARBON DIOXIDE (CO[2]) USED IN NEAR CRITICAL, CRITICAL AND SUPERCRITICAL APPLICATIONS, >/ 99.99% QUALITY
Published date
12-01-2013
Gives a specification for liquid carbon dioxide (CO[2]) that is used in near critical, critical and supercritical applications in the semiconductor industry.
Sorry this product is not available in your region.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.