SEMI C64 : 2008(R2014)
Current
Current
The latest, up-to-date edition.
SEMI STATISTICAL GUIDELINES FOR SHIP TO CONTROL
Published date
12-01-2013
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Provides a set of guidelines for the quantitative determination of statistically derived limits from process data for the purpose of defining and maintaining Ship to Control (STC) limits.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2008)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI C10 : 2009(R2014) | GUIDE FOR DETERMINATION OF METHOD DETECTION LIMITS |
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