SEMI C70 : 2016
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR TUNGSTEN HEXAFLUORIDE
Superseded date
23-10-2024
Superseded by
Published date
12-01-2013
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Gives specifications for tungsten hexafluoride (WF[6]) that are used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2011)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI C3 : 2017 | SPECIFICATIONS FOR GASES |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
| SEMI C10 : 2009(R2014) | GUIDE FOR DETERMINATION OF METHOD DETECTION LIMITS |
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