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SEMI C70 : 2016

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

SPECIFICATION FOR TUNGSTEN HEXAFLUORIDE

Superseded date

23-10-2024

Superseded by

SEMI C70:2024

Published date

12-01-2013

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Gives specifications for tungsten hexafluoride (WF[6]) that are used in the semiconductor industry.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (07/2011)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI C3 : 2017 SPECIFICATIONS FOR GASES
SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS
SEMI C10 : 2009(R2014) GUIDE FOR DETERMINATION OF METHOD DETECTION LIMITS

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