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SEMI C70:2024

Current

Current

The latest, up-to-date edition.

Specification for Tungsten Hexafluoride (WF6)

Available format(s)

Hardcopy

Language(s)

English

Published date

01-09-2024

€161.52
Excluding VAT

This Document covers requirements for tungsten hexafluoride used in the semiconductor industry.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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