SEMI C70:2024
Current
Current
The latest, up-to-date edition.
Specification for Tungsten Hexafluoride (WF6)
Available format(s)
Hardcopy
Language(s)
English
Published date
01-09-2024
This Document covers requirements for tungsten hexafluoride used in the semiconductor industry.
DocumentType |
Standard
|
Pages |
0
|
PublisherName |
Semiconductor Equipment & Materials Institute
|
Status |
Current
|
Supersedes |
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